Published September 1999 | Version v1
Journal article Metadata-only

Gas-phase reduction of molybdenum and tantalum chlorides with cadmium and zinc

Creators

  • 1. Fiziko-Tekhnicheskij Inst., UrO Rossijskoj AN, Izhevsk (Russian Federation)
  • 2. Inst. Prikladnoj Mekhaniki, UrO Rossijskoj AN, Izhevsk (Russian Federation)

Description

The thermodynamical analysis of processes of gas-phase reduction of molybdenum and tantalum chlorides with cadmium and zinc is presented. The optimal parameters of the Mo and Ta deposition on a copper substrate are evaluated. It is shown that the gas-phase reduction of metal chlorides with cadmium and zinc is a perspective method of chemical gas-phase deposition. This method makes it possible to contact the process of deposition of single-phase metallic films at relatively low temperatures and without hydrogen

Additional details

Additional titles

Original title (Russian)
Газофазное восстановление кадмием и цинком хлоридов Мо, Та

Publishing Information

Journal Title
Neorganicheskie Materialy
Journal Volume
35
Journal Issue
9
Journal Page Range
p. 1057-1060
ISSN
0002-337X
CODEN
NEOMB8

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
31005208
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
CADMIUM; CHEMICAL VAPOR DEPOSITION; FILMS; MOLYBDENUM; MOLYBDENUM CHLORIDES; REDUCTION; TANTALUM; TANTALUM CHLORIDES; THERMODYNAMICS; ZINC
Descriptors DEC
CHEMICAL COATING; CHEMICAL REACTIONS; CHLORIDES; CHLORINE COMPOUNDS; DEPOSITION; ELEMENTS; HALIDES; HALOGEN COMPOUNDS; METALS; MOLYBDENUM COMPOUNDS; SURFACE COATING; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS

Optional Information

Notes
5 refs., 3 figs.