Published 2000
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Formation of silicon nitride at pulse irradiation of surface by nitric plasma
Description
no abstract available
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31065488.pdf
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Additional details
Additional titles
- Original title (English)
- Tekhnologii yadernoj ehnergetiki. Tezisy dokladov
Publishing Information
- Publisher
- Institute of Nuclear Physics NNC RK
- Imprint Place
- Almaty (Kazakhstan)
- Imprint Title
- Nuclear power technologies. Abstracts of reports
- Imprint Pagination
- 250 p.
- Journal Page Range
- p. 118
- Report number
- INIS-KZ--068
Conference
- Title
- International seminar on nuclear power technologies
- Original Conference Title
- Mezhdunarodnyj seminar po tekhnologii yadernoj ehnergetiki
- Dates
- 14-17 May 2000
- Place
- Astana (Kazakhstan)
INIS
- Country of Publication
- Kazakhstan
- Country of Input or Organization
- Kazakhstan
- INIS RN
- 31065488
- Subject category
- S38: RADIATION CHEMISTRY, RADIOCHEMISTRY AND NUCLEAR CHEMISTRY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ION IMPLANTATION; NITROGEN; PLASMA; PULSED IRRADIATION; SILICON NITRIDES; SPECTROSCOPY
- Descriptors DEC
- ELEMENTS; IRRADIATION; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; SILICON COMPOUNDS
Optional Information
- Notes
- Imprint:Document printed and available in two languages (RU, EN);Tekhnologii yadernoj ehnergetiki. Tezisy dokladov