Polymeric variable optical attenuators based on magnetic sensitive stimuli materials
Creators
- 1. Instituto de Microelectrónica de Barcelona, IMB-CNM (CSIC), Esfera UAB, Campus UAB, 08193 Bellaterra (Spain)
- 2. Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne (Switzerland)
- 3. Institut für Mikrotechnik, Technische Universität Braunschweig, 38106 Braunschweig (Germany)
Description
Magnetically-actuable, polymer-based variable optical attenuators (VOA) are presented in this paper. The design comprises a cantilever which also plays the role of a waveguide and the input/output alignment elements for simple alignment, yet still rendering an efficient coupling. Magnetic properties have been conferred to these micro-opto-electromechanical systems (MOEMS) by implementing two different strategies: in the first case, a magnetic sensitive stimuli material (M-SSM) is obtained by a combination of polydimethylsiloxane (PDMS) and ferrofluid (FF) in ratios between 14.9 wt % and 29.9 wt %. An M-SSM strip under the waveguide-cantilever, defined with soft lithography (SLT), provides the required actuation capability. In the second case, specific volumes of FF are dispensed at the end of the cantilever tip (outside the waveguide) by means of inkjet printing (IJP), obtaining the required magnetic response while holding the optical transparency of the waveguide-cantilever. In the absence of a magnetic field, the waveguide-cantilever is aligned with the output fiber optics and thus the intrinsic optical losses can be obtained. Numerical simulations, validated experimentally, have shown that, for any cantilever length, the VOAs defined by IJP present lower intrinsic optical losses than their SLT counterparts. Under an applied magnetic field (Bapp), both VOA configurations experience a misalignment between the waveguide-cantilever and the output fiber optics. Thus, the proposed VOAs modulate the output power as a function of the cantilever displacement, which is proportional to Bapp. The experimental results for the three different waveguide-cantilever lengths and six different FF concentrations (three per technology) show maximum deflections of 220 µm at 29.9 wt % of FF for VOASLT and 250 µm at 22.3 wt % FF for VOAIJP, at 0.57 kG for both. These deflections provide maximum actuation losses of 16.1 dB and 18.9 dB for the VOASLT and VOAIJP, respectively. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0960-1317/24/12/125008Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Micromechanics and Microengineering. Structures, Devices and Systems
- Journal Volume
- 24
- Journal Issue
- 12
- Journal Page Range
- [14 p.]
- ISSN
- 0960-1317
- CODEN
- JMMIEZ
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47057984
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- COMPUTERIZED SIMULATION; CONCENTRATION RATIO; FIBER OPTICS; LENGTH; LOSSES; MAGNETIC FIELDS; MAGNETIC MATERIALS; MAGNETIC PROPERTIES; MEMS; POLYMERS; STIMULI; WAVEGUIDES
- Descriptors DEC
- DIMENSIONLESS NUMBERS; DIMENSIONS; MATERIALS; OPTICS; PHYSICAL PROPERTIES; SIMULATION