Published November 1991 | Version v1
Journal article Metadata-only

Synthesis of diamond with microwave plasma chemical vapor deposition method

Creators

  • 1. Department of Chemistry, Jilin Univ., Changchun (China)

Description

The synthesis of diamond on silicon or silica glass substrate by means of microwave (2450 MHhz) plasma chemical vapor deposition in a stream of hydrogen methane mixture was studied, the experimental conditions for formation of diamond in microwave glow discharge were examined and evaluated

Additional details

Publishing Information

Journal Title
Acta Scientiarum Naturalium Universitatis Jilinensis
Journal Issue
no.4
Journal Page Range
p. 109-110.
ISSN
0529-0279
CODEN
CLTTDI

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
24040670
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
CHEMICAL VAPOR DEPOSITION; DIAMONDS; GLOW DISCHARGES; MICROWAVE RADIATION; PLASMA; SILICON; SUBSTRATES; SYNTHESIS
Descriptors DEC
CARBON; CHEMICAL COATING; DEPOSITION; ELECTRIC DISCHARGES; ELECTROMAGNETIC RADIATION; ELEMENTS; MINERALS; NONMETALS; RADIATIONS; SEMIMETALS; SURFACE COATING