Preferential sputtering of random alloys components: theory and analysis of experimental data

Preferential sputtering of the single alloy components is explained by preferential diffusion of interstitial dumb bells on the surface. On the base of alloy components balance mass equation including preferential flux of diffusing interstitial atoms, a dependence of changing layer composition on volume composition is obtained. Method of Auger spectroscopy data treatment with account of changing layer profile is proposed. Parameters of theory are determined from analysis of the experimental data