Laser and particle beam chemical processes on surface

The symposium presented in this volume dealt with beam-induced chemical processes on surfaces. Work is described in a variety of areas, including the deposition or etching of metal, semiconductor, and dielectric films by photon-, ion-, electron-, or plasma-enhanced chemical processes; the laser-or-ion-induced ablation or sputtering of metal, semiconductor, dielectric, superconductor, and polymer films; the laser-induced physical or chemical modification of surfaces, such as the planarization of metal films, the doping or crystallization of semiconductors, and the formation of dielectrics on semiconductors; and the use of ion or electron beams to affect material properties, for example, by modifying interfacial bonding, inducing surface desorption, or writing conducting or superconducting lines in precursor films