Development of the detector response function approach in the least-squares analysis of X-ray fluorescence spectra

A procedure to obtain a semiempirical model for the elemental X-ray intensity pulse-height distribution libraries necessary in the library least-squares analysis of X-ray intensities for energy dispersive X-ray fluorescence spectra is outlined. This is accomplished by first obtaining the response function of the Si(Li) detector for incident photons in the energy range of interest. Subsequently, this response function is used to generate the desired elemental library standards for use in the least-squares analysis of spectra, or it can be used directly within a least-squares computer program, thus eliminating the large amount of computer storage required for these standards. The primary advantages of this approach are increased accuracy and the elimination of the large amount of experimental effort required in the preparation of the pure elemental standards necessary for obtaining the elemental X-ray intensity pulse-height distribution libraries. (Auth.)