Published May 2005 | Version v1
Journal article

EELS in the TEM

  • 1. Department of Physics, Faculty of Science, University of Alberta, 412 Avadh Bhatia, Edmonton, Alta., T6G 2J1 (Canada)

Description

This review deals with the spectroscopy of the electrons that have passed through a thin sample in a transmission electron microscope. Many of these electrons undergo inelastic scattering and their energy loss provides information about the chemical and structural properties of the specimen. The instrumentation required for EELS and energy-filtered imaging is described, together with the features found in a typical energy-loss spectrum. Examples are given of practical applications of plasmon-loss and core-loss spectroscopy, as well as energy-filtered imaging. Finally, EELS is compared with other spectroscopic techniques in terms of range of application, sensitivity, spatial resolution and radiation damage

Additional details

Identifiers

DOI
10.1016/j.elspec.2003.12.009;
PII
S0368-2048(04)00403-7;

Publishing Information

Journal Title
Journal of Electron Spectroscopy and Related Phenomena
Journal Volume
143
Journal Issue
2-3
Journal Page Range
p. 45-52
ISSN
0368-2048
CODEN
JESRAW

Optional Information

Copyright
Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.