Published March 2006 | Version v1
Journal article Metadata-only

Fabrication of a Boersch phase plate for phase contrast imaging in a transmission electron microscope

Creators

  • 1. Department of Structural Biology, Max-Planck-Institute of Biophysics, D-60438 Frankfurt (Germany)
  • 2. Laboratorium fuer Elektronenmikroskopie, Universitaet Karlsruhe, D-76128 Karlsruhe (Germany)
  • 3. Laboratorium fuer Elektronenmikroskopie, Universitaet Karlsruhe, D-76128 Karlsruhe (Germany) and DFG Center for Functional Nanostructures, Universitaet Karlsruhe, D-76128 Karlsruhe (Germany)

Description

The Boersch phase plate for a transmission electron microscope (TEM) offers major advantages over other phase plate concepts. However, due to its miniature dimensions, it could not be constructed and implemented so far. We report the first successful fabrication of a Boersch phase plate, which was produced by a combination of electron-beam and focused ion-beam lithography on a freestanding silicon nitride membrane. The manufactured multilayer electrode structure was tested for its functionality as an electrostatic einzel lens in a TEM. First experiments show that it can be used as a phase shifting device, as proposed by Boersch, to optimize phase contrast transfer in transmission electron microscopy

Additional details

Identifiers

DOI
10.1063/1.2179411;

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
77
Journal Issue
3
Journal Page Range
p. 033701-033701.4
ISSN
0034-6748
CODEN
RSINAK

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37083217
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ELECTRODES; ELECTRON BEAMS; ELECTROSTATIC LENSES; EQUIPMENT; FABRICATION; ION BEAMS; MEMBRANES; OPTICS; PLATES; SILICON NITRIDES; TRANSMISSION ELECTRON MICROSCOPY
Descriptors DEC
BEAMS; ELECTRON MICROSCOPY; LENSES; LEPTON BEAMS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; PARTICLE BEAMS; PNICTIDES; SILICON COMPOUNDS

Optional Information

Notes
(c) 2006 American Institute of Physics