Published April 14, 2008
| Version v1
Journal article
Nonequilibrium and effect of gas mixtures in an atmospheric microplasma
Creators
- 1. Department of Microelectronic Engineering, Rochester Institute of Technology, Rochester, New York 14623 (United States) and National Institute of Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568 (Japan)
Description
The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state
Additional details
Identifiers
- DOI
- 10.1063/1.2912039;
- arXiv
- arXiv:1003.2714v1;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 92
- Journal Issue
- 15
- Journal Page Range
- p. 151505-151505.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 39112190
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; ION TEMPERATURE; METHANE; MIXTURES; OXYGEN; THERMODYNAMIC PROPERTIES
- Descriptors DEC
- ALKANES; DISPERSIONS; ELEMENTS; HYDROCARBONS; NONMETALS; ORGANIC COMPOUNDS; PHYSICAL PROPERTIES; SPECTROSCOPY
Optional Information
- Notes
- (c) 2008 American Institute of Physics