Published January 1, 2005 | Version v1
Journal article Metadata-only

A micro-displacement stage for scanning white-light interferometry

Creators

  • 1. School of Mechantronic Engineering, Wuhan University of Technology, Wuhan, Hubei Province (China)
  • 2. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, Hubei Province (China)

Description

A one-dimension micro-displacement stage used in scanning white-light interferometry (SWLI) profilometer is presented. The stage is a set of two-grade displacement mechanisms that has a hologram diffraction grating fixed on it to form a closed-loop displacement measuring and control system. The stage's vertical scanning range is up to 6 mm, the vertical resolution 1 nm. Finite element analysis has been used to study the behavior of the flexural hinge guided motion nano-positioning stage. The experimental results of surface profiles of standards sample are also presented

Availability note (English)

Available online at http://stacks.iop.org/1742-6596/13/94/jpconf5_13_022.pdf or at the Web site for the Journal of Physics. Conference Series (Online) (ISSN 1742-6596) http://www.iop.org/

Additional details

Identifiers

URL
http://stacks.iop.org/1742-6596/13/94/jpconf5_13_022.pdf; http://www.iop.org/;
DOI
10.1088/1742-6596/13/1/022;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
13
Journal Issue
1
Journal Page Range
p. 94-97
ISSN
1742-6596

Conference

Title
7. international symposium on measurement technology and intelligent instruments
Dates
6-8 Sep 2005
Place
Huddersfield (United Kingdom)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36111532
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CONTROL SYSTEMS; DIFFRACTION GRATINGS; FINITE ELEMENT METHOD; HOLOGRAPHY; INTERFEROMETRY; MEASURING METHODS; NANOSTRUCTURES; POSITIONING; RESOLUTION; VISIBLE RADIATION
Descriptors DEC
CALCULATION METHODS; ELECTROMAGNETIC RADIATION; MATHEMATICAL SOLUTIONS; NUMERICAL SOLUTION; RADIATIONS