Published 2008
| Version v1
Miscellaneous
Deposition of the Ti-Si-N-coatings from the filtered vacuum-arc plasma
Creators
- 1. NSC 'Kharkiv Institute for Physics and Technology', Kharkiv (Ukraine)
- 2. Institute of Strength Physics and Materials Science, Tomsk (Russian Federation)
Description
The results of experiments presented on deposition of Ti-Si-N coatings from the filtered vacuum-arc plasma, generated in the source with the cathode composed of Ti-Si manufactured by the method of the powder metallurgy. structure and composition of the materials of the cathode and the coatings were investigated by the X-ray method. Si concentration in all of the coatings investigated was revealed to be smaller than that in the cathodes were shown to be suitable in principle for the purpose of manufacturing nano-composite Ti-Si-N coatings by the filtered vacuum-arc deposition method.
Additional details
Additional titles
- Original title (Russian)
- Получение Ти-Си-Н-покрытий из фильтрованной вакуумно-дуговой плазмы
Publishing Information
- Imprint Title
- Nanotechnologies. Proceedings of Kharkiv Nanotechnology Congress-2008. Volume 1
- Imprint Pagination
- 224 p.
- Journal Page Range
- p. 24-29
- Report number
- INIS-UA--145
Conference
- Title
- Kharkiv Nanotechnology Congress 2008
- Original Conference Title
- Nanotekhnologii. Sbornik dokladov Khar'kovskoj Nanotekhnologicheskoj Assamblei-2008. Tom 1.
- Dates
- 26-30 May 2008
- Place
- Kharkiv (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 41049546
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- CATHODE SPUTTERING; CONCENTRATION RATIO; DEPOSITION; MICROSTRUCTURE; NITROGEN; PLASMA ARC SPRAYING; SILICON; SINTERING; SURFACE COATING; TITANIUM; USES; VAPOR DEPOSITED COATINGS; X-RAY DIFFRACTION
- Descriptors DEC
- COATINGS; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; DIMENSIONLESS NUMBERS; ELEMENTS; FABRICATION; METALS; NONMETALS; SCATTERING; SEMIMETALS; SPRAY COATING; SPUTTERING; SURFACE COATING; TRANSITION ELEMENTS