Backscattering factor in the quantitative Auger spectroscopy

The aim of the paper is the model consideration of a factor of the electron back scattering. Perpendicular and inclined initial electron beam incidence is investigated. A good agreement of a simple physical model with the experiment is observed for the perpendicular incidence of the initial beam. It is based on the assumption that the distribution of current back scattered can be presented as the product of two factors, one of which depends on energy alone, the other, on the angle alone. The continuous Everhart model is used for the case of a sloping drop. The results of calculating the factor of reverse scattering agree with results obtained by the Monte-Carlo method