Published November 1976 | Version v1
Journal article

De-excitation processes near the surface of ion bombarded SiO2 and Si

  • 1. Australian National Univ., Canberra
  • 2. Bell Telephone Labs., Inc., Murray Hill, N.J. (USA)
  • 3. Commonwealth Scientific and Industrial Research Organization, North Ryde (Australia). Div. of Mineral Physics
  • 4. New South Wales Univ., Kensington (Australia)

Description

Ion bombardment induced secondary ion and optical excitation from oxide coated Si has been studied as the oxide layer is eroded away. By comparing ion and photon yields, a model for the role of resonant and Auger electron transitions in the neutralisation and de-excitation of the sputtered atoms and ions has been suggested. (Auth.)

Additional details

Identifiers

Publishing Information

Journal Title
Surface Science
Journal Volume
60
Journal Issue
2
Series
Surf. Sci.
Journal Page Range
349-364
ISSN
0039-6028

Optional Information

Notes
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