Published February 2012 | Version v1
Journal article

The effect of small additives of argon on the parameters of a non-uniform microwave discharge in nitrogen at reduced pressures

  • 1. A V Topchiev Institute of Petrochemical Synthesis, Russian Academy of Sciences, 29 Leninsky Ave, 119991 Moscow (Russian Federation)

Description

The influence of a small addition of argon (2–5%) on the parameters of a strongly non-uniform microwave discharge (with the electrode microwave discharge as an example) in nitrogen at reduced pressures was studied. Experiments showed that the small addition of Ar strongly affected the discharge: it increased in size, and the power absorbed in the plasma and the emission intensities of nitrogen bands reduced. A self-consistent 2D modeling of the discharge was carried out. The model included the Maxwell, Poisson and Boltzmann equations and a set of balance equations for neutral excited and charged plasma species. The processes involving vibrationally excited ground state molecular nitrogen were taken into account by the well-known analytic expression for the vibrational distribution of molecules in the diffusion approximation. The results of modeling and experiment were in qualitative agreement. Additional information about the discharge allowed us to explain the experimental results. It was shown that this effect was influenced by a strong spatial non-uniformity of direct electron impact ionization rate, difference in diffusion and mobility coefficients, and difference in diffusion and volume processes of the loss of the main ions. This effect can be observed in all types of discharges if these conditions are satisfied. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/0963-0252/21/1/015015

Additional details

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
21
Journal Issue
1
Journal Page Range
[11 p.]
ISSN
0963-0252

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44005670
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
ARGON; BOLTZMANN EQUATION; HIGH-FREQUENCY DISCHARGES; NITROGEN; POISSON EQUATION; SIMULATION
Descriptors DEC
DIFFERENTIAL EQUATIONS; ELECTRIC DISCHARGES; ELEMENTS; EQUATIONS; FLUIDS; GASES; INTEGRO-DIFFERENTIAL EQUATIONS; KINETIC EQUATIONS; NONMETALS; PARTIAL DIFFERENTIAL EQUATIONS; RARE GASES