Published 2005
| Version v1
Book
Study of specific features of sputtering of SPE ceramic insulators
Creators
- 1. Moskovskij Aviatsionnyj Inst. - Gosudarstvennyj Tekhnicheskij Univ., Moscow (Russian Federation)
Description
The process of surface sputtering of borosil type ceramics (B0.31N0.31O0.15C0.16Si0.06X0.01) with Zr and Hf microadditions are investigated for operating conditions of a plasma engine. Using methods of X-ray fluorescence analysis and Rutherford backscattering an essential increase of boron in subsurface layers is revealed. The nonuniformity of chemical composition of ceramic surface and elevated contents of ZrO2 and HfO2 are also found. It is concluded that the ceramics of given composition is resistant to plasma, in particular, if the plasma contains nitrogen
Abstract (Russian)
Исследован процесс распыления поверхности керамического материала типа боросил (B0.31N0.31O0.15C0.16Si0.06X0.01) в условиях работы плазменного двигателя. Методами рентгенофлуоресцентного анализа и резерфордовского обратного рассеяния установлено существенное возрастание бора в приповерхностной области. Обнаружены также неоднородность состава поверхности керамики и повышенная концентрация ZrO2 и HfO2. Сделан вывод о плазмоустойчивости керамики данного состава при наличии азота в составе плазмыAdditional details
Additional titles
- Original title (Russian)
- Исследование особенностей процессов распыления керамического изолятора SPD
Publishing Information
- Publisher
- Izd-vo MAI
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 5-7035-1560-2
- Imprint Title
- Book of reports of XVII International conference Ion-surface interactions ISI-2005. Vol. 1
- Imprint Pagination
- 600 p.
- Journal Page Range
- p. 147-149
Conference
- Title
- 17. International conference Ion-surface interactions ISI-2005
- Original Conference Title
- XVII Mezhdunarodnaya konferentsiya Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005)
- Dates
- 25-29 Aug 2005
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38067498
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BORON OXIDES; CARBON ADDITIONS; CERAMICS; CHEMICAL COMPOSITION; ELECTRICAL INSULATORS; HAFNIUM ADDITIONS; NITROGEN ADDITIONS; PLASMA; RADIATION EFFECTS; SILICON OXIDES; SPUTTERING; SURFACES; ZIRCONIUM ADDITIONS
- Descriptors DEC
- ALLOYS; BORON COMPOUNDS; CHALCOGENIDES; ELECTRICAL EQUIPMENT; EQUIPMENT; HAFNIUM ALLOYS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS; TRANSITION ELEMENT ALLOYS; ZIRCONIUM ALLOYS
Optional Information
- Notes
- 1 ref., 1 fig. Imprint:Materialy XVII Mezhdunarodnoj konferentsii Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005). Tom 1