Published May 1, 2021 | Version v1
Journal article

Morphology and crystalline property of an AlN single crystal grown on AlN seed

  • 1. China Electronics Technology Group Corp 46th Research Institute, Tianjin 300220 (China)
  • 2. China Electronics Technology Group Corp 44th Research Institute, Chongqing 400060 (China)

Description

AlN single crystal grown by physical vapor transport (PVT) using homogeneous seed is considered as the most promising approach to obtain high-quality AlN boule. In this work, the morphology of AlN single crystals grown under different modes (3D islands and single spiral center) were investigated. It is proved that, within an optimized thermal distribution chamber system, the surface temperature of AlN seed plays an important role in crystal growth, revealing a direct relationship between growth mode and growth condition. Notably, a high-quality AlN crystal, with (002) and (102) reflection peaks of 65 and 36 arcsec at full width at half maximum (FWHM), was obtained grown under a single spiral center mode. And on which, a high-quality AlxGa1– xN epitaxial layer with high Al content (x = 0.54) was also obtained. The FWHMs of (002) and (102) reflection of AlxGa1– xN were 202 and 496 arcsec, respectively, which shows superiority over their counterpart grown on SiC or a sapphire substrate. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1674-4926/42/5/052101

Additional details

Publishing Information

Journal Title
Journal of Semiconductors
Journal Volume
42
Journal Issue
5
Journal Page Range
[6 p.]
ISSN
1674-4926

INIS

Country of Publication
China
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53082976
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S42: ENGINEERING;
Descriptors DEI
ALUMINIUM NITRIDES; EPITAXY; LAYERS; MONOCRYSTALS; PEAKS; SILICON CARBIDES; SUBSTRATES; SURFACES
Descriptors DEC
ALUMINIUM COMPOUNDS; CARBIDES; CARBON COMPOUNDS; CRYSTAL GROWTH METHODS; CRYSTALS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS