Improvement of the crstallinity of MgZnO with a Zn bugger layer by sol-gel spin-coating method
- 1. Dept. of Nanoscience and Engineering, Inje University, Gimhae (Korea, Republic of)
Description
We fabricate magnesium zinc oxide (MZO) thin films inserting a buffer layer between a film and a substrate with different annealing temperatures. The structural and optical properties of MZO thin films are investigated by using scanning electron microscopy, X-ray diffraction (XRD), and photoluminescence. The XRD patterns for the buffer layers annealed at 200 °C show the narrowest full width at half maximum and the most intense (0 0 2) diffraction peak. In addition, the buffer layers decrease the magnitude of the residual stress between the MZO thin film and the silicon substrate. The near-band-edge emission peaks intensify and the deep-level emission peaks significantly intensify with increasing buffer layer annealing temperatures. Inserting a buffer layer between a film and a substrate improves the crystallinity of MZO thin films
Additional details
Publishing Information
- Journal Title
- Bulletin of the Korean Chemical Society
- Journal Volume
- 36
- Journal Issue
- 6
- Series
- 29 refs, 3 figs, 1 tab
- Journal Page Range
- p. 1575-1579
- ISSN
- 0253-2964
INIS
- Country of Publication
- Korea, Republic of
- Country of Input or Organization
- Korea, Republic of
- INIS RN
- 48082083
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- ANNEALING; EMISSION; FABRICATION; MAGNESIUM OXIDES; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X-RAY DIFFRACTION
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; ELECTRON MICROSCOPY; EMISSION; FILMS; HEAT TREATMENTS; LUMINESCENCE; MAGNESIUM COMPOUNDS; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; PHOTON EMISSION; PHYSICAL PROPERTIES; SCATTERING; STRESSES