Composition of anodic oxide films on InSb

Anodic oxide films on InSb obtained in a potentiostatic regime in a non-aqueous solution of oxygen-containing salt in dimethylformamide with glycerine comprise In2O3 crystallites of a cubic modification and α-Sb2O3 with an orthorhombic lattice with Sn2O3 traces in an amorphous state. No elemental antimony has been found either in the anodic oxide film volume or at the film - InSb substrate interface. Annealing at 100 and 150 deg in vacuum does not practically change the degree of oxidation of the elements in the anodic oxide film and the depth distribution of the oxides