3D features of modified photostructurable glass-ceramic with infrared femtosecond laser pulses
- 1. Universitat de Barcelona, Departament de Fisica Aplicada i Optica, Marti i Franques 1, E-08028 Barcelona (Spain)
Description
The exclusive ability of laser radiation to be focused inside transparent materials makes lasers a unique tool to process inner parts of them unreachable with other techniques. Hence, laser direct-write can be used to create 3D structures inside bulk materials. Infrared femtosecond lasers are especially indicated for this purpose because a multiphoton process is usually required for absorption and high resolution can be attained. This work studies the modifications produced by 450 fs laser pulses at 1027 nm wavelength focused inside a photostructurable glass-ceramic (Foturan) at different depths. Irradiated samples were submitted to standard thermal treatment and subsequent soaking in HF solution to form the buried microchannels and thus unveil the modified material. The voxel dimensions of modified material depend on the laser pulse energy and the depth at which the laser is focused. Spherical aberration and self-focusing phenomena are required to explain the observed results.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.apsusc.2010.11.008Additional details
Identifiers
- DOI
- 10.1016/j.apsusc.2010.11.008;
- PII
- S0169-4332(10)01531-X;
Publishing Information
- Journal Title
- Applied Surface Science
- Journal Volume
- 257
- Journal Issue
- 12
- Journal Page Range
- p. 5219-5222
- ISSN
- 0169-4332
- CODEN
- ASUSEE
Conference
- Title
- Symposium R - Laser processing and diagnostics for micro and nano applications
- Acronym
- E-MRS 2010 spring meeting
- Dates
- 7-11 Jun 2010
- Place
- Strasbourg (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44024426
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABSORPTION; BEAMS; CERAMICS; DISTRIBUTION; GEOMETRICAL ABERRATIONS; GLASS; HEAT TREATMENTS; HYDROFLUORIC ACID; INFRARED RADIATION; LASER RADIATION; MODIFICATIONS; MULTI-PHOTON PROCESSES; RESOLUTION; WAVELENGTHS
- Descriptors DEC
- ELECTROMAGNETIC RADIATION; FLUORINE COMPOUNDS; HALOGEN COMPOUNDS; HYDROGEN COMPOUNDS; INORGANIC ACIDS; INORGANIC COMPOUNDS; RADIATIONS; SORPTION
Optional Information
- Copyright
- Copyright (c) 2010 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.