Published 1989
| Version v1
Book
Laser scatterometer
Creators
Description
The design concept and test performance of a laser scatterometer for the characterization of smooth optical surfaces are discussed. The fundamental principles of surface-roughness measurement are reviewed; the correction for back-surface scattering is explained; a diagram of the present experimental setup is presented; and results from successful test measurements on opaque and transparent samples are presented in a table
Additional details
Publishing Information
- Publisher
- Society of Photo-Optical Instrumentation Engineers.
- Imprint Place
- Bellingham, WA (USA)
- Imprint Title
- Stray light and contamination in optical systems; Proceedings of the Meeting, San Diego, CA, Aug. 17-19, 1988
- Imprint Pagination
- 342 p.
- Journal Page Range
- p. 192-196.
Conference
- Title
- Stray light and contamination in optical systems meeting.
- Dates
- 17-19 Aug 1988.
- Place
- San Diego, CA (USA).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 21008076
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- LASERS; MEASURING INSTRUMENTS; OPACITY; PERFORMANCE TESTING; ROUGHNESS; SCATTERING; SPECIFICATIONS; SURFACE PROPERTIES
- Descriptors DEC
- AMPLIFIERS; EQUIPMENT; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; TESTING
Optional Information
- Secondary number(s)
- CONF-8808266--.