Measurements of K-shell ionization cross sections of Al and L-shell x-ray production cross sections of Se by intermediate-energy electron impact

The K-shell ionization cross sections of Al (Z = 13) and the total L-shell x-ray production cross sections of Se (Z = 34) from electron impacts with kinetic energies ranging from several keV to several tenths of keV have been measured by using an improved experimental setup. An Al target of monoatomic and grid carbon substrate, which consisted of ultrathin Al film (∼3 nm) deposited onto grid carbon substrate (∼200 nm) with a layer of monoatomic carbon between the film and the grid substrate, was first proposed and measured. In addition, targets of Al film (∼3 nm) and Se film (∼7.8 nm) deposited respectively onto thick carbon substrate (∼2 mm) were also measured. Our experimental results are compared with the distorted-wave Born approximation (DWBA) theory and experimental data from the literature. It has been observed that within the uncertainties, the DWBA agrees with our experimental measurements of K-shell ionization cross sections of Al and the total L-shell x-ray production cross sections of Se, and our measured data of Al K-shell ionization cross sections are consistent with the available experimental data. This is the first time that experimental data of Se-L-shell x-ray production cross sections in the intermediate-energy region have been published. (paper)