Published May 2019 | Version v1
Journal article

Simulation of growth process and control of silicon nano particle's formation in dust plasma

  • 1. AS RU, Institute of Ion Plasma and Laser Technologies, Tashkent (Uzbekistan)

Description

A physical model is proposed for the growth of silicon nanoparticles in the form based on the Mott-Gurney scheme. The concept of the formation of silicon nanoparticles from monosilane was developed, taking into account charge exchange and growth arrest. Silicon nanoparticles were grown in dust plasma at various pressures of monosilane. It is shown that the dependence of the particle size on the pressure of monosilane confirms the validity of the proposed concept. (authors)

Additional details

Additional titles

Original title (Russian)
Моделирование процесса роста и управление формированием наночастиц кремния в пылевой плазме

Publishing Information

Journal Title
Uzbekiston Fizika Zhurnali
Journal Volume
21
Journal Issue
3
Journal Page Range
p. 133-138
ISSN
1025-8817

Optional Information

Notes
12 refs., 4 figs.