Published 1982 | Version v1
Book

Towards a unified model for the formation of sputtered excited states

Creators

  • 1. IBM Watson Research Center, Yorktown Heights, NY (USA)

Description

The statistical model for the formation of sputtered excited states is most convincingly tested by comparing experiment with theory for an ensemble of yields such as SiI, SiII, and SiIII, where the internal energies span a sufficiently wide interval. The electron-exchange model was previously tested by Veje in work where group II metals were bombarded in ultrahigh vacuum and the yields of excited ions were found to be unusually high relative to excited neutrals. It is argued that, with certain reservations, the two models may constitute limiting aspects of a single model which are valid, respectively, when electron exchange is forbidden or allowed. (Auth.)

Additional details

Publishing Information

Publisher
STUDIA Studentenfoerderungsgesellschaft m.b.H.
Imprint Place
Innsbruck, Austria
Imprint Title
SASP. Symposium on atomic and surface physics '82
Imprint Pagination
381 p.
Journal Page Range
p. 84-90.

Conference

Title
Symposium on atomic and surface physics '82.
Dates
7 - 13 Feb 1982.
Place
Maria Alm/Salzburg, Austria.

INIS

Country of Publication
Austria
Country of Input or Organization
Austria
INIS RN
13693540
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
ARGON IONS; COMPARATIVE EVALUATIONS; EXPERIMENTAL DATA; KEV RANGE 10-100; SILICON; SILICON IONS; SPUTTERING; STATISTICAL MODELS; SURFACES; THEORETICAL DATA
Descriptors DEC
ATOMIC IONS; CHARGED PARTICLES; DATA; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; MATHEMATICAL MODELS; NUMERICAL DATA; SEMIMETALS