Published July 15, 1978 | Version v1
Journal article

Concentration profile determination by PIXE analysis utilizing the variation of beam energy

  • 1. Kozponti Fizikai Kutato Intezet, Budapest (Hungary)

Description

The applicability of the PIXE method by varying the beam energy for in-depth analysis was investigated. The measurements were carried out on different Al samples containing Zn and Mg, annealed during different time periods. The Zn concentration profiles for samples with different annealing were determined up to 30 μm. The method has a relatively poor depth resolution but its advantages (non-destructive multi-elemental method, applicable for a wide range of elements) make it useful especially in connection with some other profiling methods. (Auth.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods
Journal Volume
153
Journal Issue
2-3
Series
Nucl. Instrum. Methods.
Journal Page Range
553-555
ISSN
0029-554X