Published 1995
| Version v1
Miscellaneous
Open
Crystal defects production in silicon by molecular beam implantation
Creators
- 1. KFKI Research Institute for Particle and Nuclear Physics, Budapest, (Hungary)
- 2. KFKI Research Institute for Material Science, Budapest, (Hungary)
Description
Short communication
Files
28080519.pdf
Files
(18.4 kB)
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Additional details
Publishing Information
- Publisher
- Accademic Press.
- Imprint Title
- Ninth international conference on ion beam modification of materials. Book of abstracts
- Imprint Pagination
- 452 p.
- Journal Page Range
- p. 10088.
- Report number
- INIS-AU--0004
Conference
- Title
- 9. international conference on ion beam modification of materials.
- Acronym
- IBMM'95
- Dates
- 5-10 Feb 1995.
- Place
- Canberra (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28080519
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- BACKSCATTERING; BORON FLUORIDES; CHANNELING; ION IMPLANTATION; MOLECULAR IONS; PHYSICAL RADIATION EFFECTS; RADIATION FLUX; SILICON; STRUCTURAL CHEMICAL ANALYSIS; TEMPERATURE DEPENDENCE
- Descriptors DEC
- BORON COMPOUNDS; CHARGED PARTICLES; ELEMENTS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; IONS; RADIATION EFFECTS; SCATTERING; SEMIMETALS