Growth of oxide superconducting thin films by plasma-enhanced MOCVD
Creators
- 1. Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185 (Japan)
Description
In this paper the effects of plasma- enhancement on MOCVD for growing superconducting YBa2Cu3Ox thin films is studied. It is revealed that plasma-enhancement accelerates crystallization of YBa2Cu3Ox so that growth temperatures of superconducting films can be decreased by about 150 degrees C. Thin films grown by plasma-enhanced MOCVD at 515 degrees C and 580 degrees C indicate zero-resistivity temperatures of 60K and 84K, respectively. Critical current density in the film grown by plasma-enhanced MOCVD at 580 degrees C is 105 A/cm2 at 77K. Infrared absorption spectroscopy and ultraviolet and visible emission spectroscopy clarify that plasma excite the metalorganic compounds and that this excitation promotes oxidation of metalorganic compounds and crystallization of YBa2Cu3Ox
Additional details
Publishing Information
- Publisher
- Society of Petroleum Engineers.
- Imprint Place
- Richardson, TX (United States)
- ISBN
- 0-8194-0463-2
- Imprint Title
- Progress in high-temperature superconducting transistors and other devices
- Imprint Pagination
- 284 p.
- Journal Page Range
- p. 238-243.
Conference
- Title
- Society of Photo-Optical Instrumentation Engineers (SPIE) conference on progress in high temperature superconducting transistors and other devices.
- Dates
- 30 Sep - 5 Oct 1990.
- Place
- Santa Clara, CA (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 23056818
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BARIUM OXIDES; CHEMICAL VAPOR DEPOSITION; COPPER OXIDES; CRITICAL CURRENT; CRYSTAL GROWTH METHODS; CURRENT DENSITY; EMISSION SPECTRA; ETCHING; FABRICATION; INFRARED SPECTRA; ORGANOMETALLIC COMPOUNDS; SOLID-STATE PLASMA; SUPERCONDUCTING FILMS; SUPERCONDUCTIVITY; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; COPPER COMPOUNDS; CURRENTS; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; ELECTRICAL PROPERTIES; FILMS; ORGANIC COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; PLASMA; SPECTRA; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-9009173--.