Published April 1997 | Version v1
Journal article

Single-source MOCVD of Y-, Ba- and Cu-oxides from thd-precursors

  • 1. Technische Univ. Braunschweig (Germany). Inst. fuer Oberflaechentechnik und Plasmatechnische Werkstoffentwicklung

Description

A new developed single-source MOCVD technique has been investigated with respect to its applicability in a long term deposition process. In-situ measurements of the deposition rates demonstrated the constance of the process. Additionally the deposition kinetics of Y-, Ba- and Cu- single and mixed oxides from thd-compounds was studied. The measurements revealed a remarkably low decomposition temperature of Cu(thd)2 on CuO surfaces. (orig.)

Additional details

Publishing Information

Journal Title
Journal of Alloys and Compounds
Journal Volume
251
Journal Issue
1-2
Journal Page Range
p. 249-253.
ISSN
0925-8388
CODEN
JALCEU

Conference

Title
Growth mechanisms - interfaces - multilayers as part of the spring meeting of the European Materials Research Society (E-MRS).
Acronym
Symposium F on high temperature superconductor thin films
Dates
4-7 Jun 1996.
Place
Strasbourg (France).