Published 1999 | Version v1
Miscellaneous Metadata-only

Nanostructuring GaSb by e-beam lithography and reactive ion etching

Creators

  • 1. Institute of Electron Technology, Warsaw (Poland)
  • 2. Institute of Physics, Polish Academy of Sciences, Warsaw (Poland)

Description

no abstract available

Part of:
Abstracts of 28. International School on Physics of Semiconducting Compounds Jaszowiec'99

Additional details

Additional titles

Augmented title (English)
thin films

Publishing Information

Publisher
Polish Academy of Sciences, Institute of Physics
Imprint Place
Warsaw (Poland)
Imprint Title
Abstracts of 28. International School on Physics of Semiconducting Compounds Jaszowiec'99
Imprint Pagination
276 p.
Journal Page Range
p. 155-157

Conference

Title
28. International School on Physics of Semiconducting Compounds Jaszowiec'99
Dates
6-11 Jun 1999
Place
Ustron-Jaszowiec (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
32006263
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
DOPED MATERIALS; ELECTRON BEAMS; ETCHING; GALLIUM ANTIMONIDES; HYDROGEN; MICROELECTRONICS; NITROGEN; ORGANIC CHLORINE COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; PLASMA; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SURFACE TREATMENTS; TELLURIUM ADDITIONS; THIN FILMS
Descriptors DEC
ALLOYS; ANTIMONIDES; ANTIMONY COMPOUNDS; BEAMS; ELECTRON MICROSCOPY; ELEMENTS; FILMS; GALLIUM COMPOUNDS; LEPTON BEAMS; MATERIALS; MICROSCOPY; NONMETALS; ORGANIC COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; PARTICLE BEAMS; PNICTIDES; SURFACE FINISHING; TELLURIUM ALLOYS

Optional Information

Contract/Grant/Project number
KBN grant no. PBZ 28.11/P9
Notes
2 figs