Published 2006
| Version v1
Miscellaneous
Simulation of ion beam doping of silicon-on-sapphire heterostructure by means of Monte Carlo method with taking into account of dislocation structure
Creators
- 1. FGUP FNPTs NII Izmeritel'nykh Sistem im. Yu.E. Sedakova, Nizhnij Novgorod (Russian Federation)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Моделирование процесса ионно-лучевого легирования гетерокомпозиции кремний на сапфире методом Монте-Карло с учетом влияния дислокационной структуры
Publishing Information
- Publisher
- MGU im. M.V. Lomonosova
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Abstracts of reports of XXXVI International conference on physics of charged particle - crystal interaction
- Imprint Pagination
- 172 p.
- Journal Page Range
- p. 146
- Report number
- INIS-RU--494
Conference
- Title
- 36. International conference on physics of charged particle - crystal interaction
- Original Conference Title
- XXXVI Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 30 May - 1 Jun 2006
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38007896
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data, Non-conventional Literature
- Descriptors DEI
- BORON ADDITIONS; COMPUTERIZED SIMULATION; DEPTH; DISLOCATIONS; ION BEAMS; ION IMPLANTATION; KEV RANGE 10-100; MONTE CARLO METHOD; PHOSPHORUS ADDITIONS; SAPPHIRE; SILICON; SPATIAL DISTRIBUTION; SUBSTRATES; THEORETICAL DATA; VACANCIES
- Descriptors DEC
- ALLOYS; BEAMS; BORON ALLOYS; CALCULATION METHODS; CORUNDUM; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DATA; DIMENSIONS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; INFORMATION; KEV RANGE; LINE DEFECTS; MINERALS; NUMERICAL DATA; OXIDE MINERALS; POINT DEFECTS; SEMIMETALS; SIMULATION
Optional Information
- Notes
- 2 refs. Imprint:Tezisy dokladov XXXVI Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami