Published December 1989 | Version v1
Journal article

One approach to joining plasma and sheath

  • 1. Tokyo Denki Univ. (Japan)

Description

The letter treats the problem of joining plasma and sheath transverse to the discharge axis. The balance equations of plasma are solved from the center of the plasma to the wall. The point joining plasma and sheath is decided so that the sheath equation becomes non-negative. It is thought that the results of this letter will be useful in the analysis of the probe diagnostics, plasma processing, etc. (author)

Additional details

Publishing Information

Journal Title
Japanese Journal of Applied Physics, Part 2
Journal Volume
28
Journal Issue
12
Series
Jpn. J. Appl. Phys., Part 2.
Journal Page Range
L2261-L2264
ISSN
0021-4922
CODEN
JAPLD