Published September 1, 2019 | Version v1
Journal article Metadata-only

Modern engineering tools for the development of new samples of vacuum process equipment

Creators

  • 1. FERRY VATT LLC, Kazan, Kutuya St., 159 (Russian Federation)

Description

The paper presents the tools and methods used in the company for the development of new types of vacuum process equipment. A description of the design tools used and the results obtained for the examples of the development of vacuum melting radio frequency (RF) plasma and vacuum test equipment has been given. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1313/1/012062

Additional details

Identifiers

DOI
10.1088/1742-6596/1313/1/012062;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1313
Journal Issue
1
Journal Page Range
[5 p.]
ISSN
1742-6596

Conference

Title
26. International Conference on Vacuum Technique and Technology
Dates
18-20 Jun 2019
Place
Saint Petersburg (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53047637
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DESIGN; ENGINEERING; PLASMA; RADIOWAVE RADIATION; VACUUM MELTING
Descriptors DEC
ELECTROMAGNETIC RADIATION; MELTING; PHASE TRANSFORMATIONS; RADIATIONS