Published 1999
| Version v1
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Characterisation of amorphous silicon alloys by RBS/ERD with self consistent data analysis using simulated annealing
- 1. Instituto Tecnologico e Nuclear, Sacavem, (Portugal)
- 2. University of Surrey, Guilford, (United Kingdom). Ion Beam Centre
- 3. South Bank University, London, (United Kingdom). School of Electrical, Electronic and Information Engineering
Description
Full text: Hydrogenated amorphous silicon films are deposited by CVD onto insulating (silica) substrates for the fabrication of solar cells. 1.5MeV 4He ERD/RBS is applied to the films, and a self consistent depth profile of Si and H using the simulated annealing (SA) algorithm was obtained for each sample. The analytical procedure is described in detail, and the confidence limits of the profiles are obtained using the Markov Chain Monte Carlo method which is a natural extension of the SA algorithm. We show how the results are of great benefit to the growers
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Additional details
Publishing Information
- Imprint Place
- Lucas Heights (Australia)
- Imprint Title
- The 11th Australian Conference on Nuclear Techniques of Analysis and the 5th Vacuum Society of Australia Congress. Proceedings
- Imprint Pagination
- 310 p.
- Journal Page Range
- p. 281
- Report number
- INIS-AU--0043
Conference
- Title
- 11. Australian Conference on Nuclear Techniques of Analysis; 5. Vacuum Society of Australia Congress
- Dates
- 24-26 Nov 1999
- Place
- Lucas Heights, NSW (Australia)
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 31026675
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AMORPHOUS STATE; HELIUM 4; ION SCATTERING ANALYSIS; MONTE CARLO METHOD; RUTHERFORD SCATTERING; SILICON ALLOYS; SIMULATION; STRUCTURAL CHEMICAL ANALYSIS; THIN FILMS
- Descriptors DEC
- ALLOYS; CALCULATION METHODS; CHEMICAL ANALYSIS; ELASTIC SCATTERING; EVEN-EVEN NUCLEI; FILMS; HELIUM ISOTOPES; ISOTOPES; LIGHT NUCLEI; NONDESTRUCTIVE ANALYSIS; NUCLEI; SCATTERING; STABLE ISOTOPES
Optional Information
- Notes
- Abstract only. 2 refs.