Surface analysis by glow discharge spectrometry: cathode zone and sputtering yield

Applications of the glow discharge optical spectroscopy for surface analysis are numerous. Moreover, this method enables to get qualitative and semi-quantitative results which are already significant. However, we should improve our knowledge of the physical parameters involved in the glow discharge lamp mechanisms and learn to handle such phenomena. The problems can be divided into two categories: sputtering of the target under argon ions accelerated in the cathode dark space, and luminous emission of torn away species which reach the negative glow region. Our aim was to take stock of the present theoretical knowledge which can be applied to the specific self-maintained glow discharge plasma. Moreover, we tried to link together (often roughly) the basic discharge parameters, i.e. current intensity I, voltage of the lamp Vg, pressure of the gas p. Specially a comparison between theoretical and experimental results was established concerning the pure target sputtering yields. The contribution of the argon ions striking the cathode is estimated taking into account their energetic distribution. The role of the fast argon neutrals produced by charge exchange with the ions is important; we evaluated their energetic distribution and their contribution to sputtering. The total theoretical sputtering yield is inferred: the comparison with experimental results is presented. The role of the gas temperature is emphasized