Published April 23, 2007
| Version v1
Journal article
Investigation of Texture and Residual Stresses in Reactive Magnetron Sputtered TiN coatings on M2 Steel Substrates
- 1. Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5 blvd. James Bouchier, 1164 Sofia (Bulgaria)
- 2. Institute for Nuclear Research and Nuclear Energy, 72 Tzarigradsko Chaussee, BG-1784 Sofia (Bulgaria)
- 3. Surface Engineering Group, Department of Chemistry and Materials, Manchester Metropolitan University, Manchester M15GD (United Kingdom)
Description
The development of crystallographic texture and residual macro-stresses during the growth from 500 nm to 4000 nm of TiN films applied by reactive Closed Field Unbalanced Magnetron Sputtering (CFUBMS) on M2 tool steel at three direct target currents (Id) (namely 4, 6 and 8A) have been analyzed via X-ray diffraction
Additional details
Identifiers
- DOI
- 10.1063/1.2733372;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 899
- Journal Issue
- 1
- Journal Page Range
- p. 631
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 6. international conference of the Balkan Physical Union
- Dates
- 22-26 Aug 2006
- Place
- Istanbul (Turkey)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 39074436
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COATINGS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; FILMS; SPUTTERING; STEELS; SUBSTRATES; SURFACE COATING; TEXTURE; TITANIUM NITRIDES; X-RAY DIFFRACTION
- Descriptors DEC
- ALLOYS; CARBON ADDITIONS; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; IRON ALLOYS; IRON BASE ALLOYS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SCATTERING; TITANIUM COMPOUNDS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2007 American Institute of Physics