Nested folded-beam suspensions with low longitudinal stiffness for comb-drive actuators

Nested folded-beam suspensions with a low longitudinal spring constant and a high lateral spring constant have been used in comb-drive actuators. In the new design, every two flexible beams and two stiff members form a parallelogram flexure, which is considered as an 'element' of the nested folded-beam suspension. A set of these flexures of increasing size were placed one outside another to compose a nested structure. In this way, a serial mechanical connection between adjacent parallelogram flexures was formed; thus, a longer output stroke was obtained by combining the stroke displacements of all flexures in an additive fashion. The designed suspensions were theoretically analyzed and numerically simulated. Furthermore, comb-drive actuators with conventional and new suspensions were fabricated and tested to verify the predicted function. In the testing cases, the longitudinal spring constants of suspensions with two (conventional), three and four parallelogram flexures on each side were measured as 2.77, 1.75 and 1.36 N m⁻¹. The ratio among these three values was approximately 6:4:3, which is consistent with the theoretical predictions and simulation results. Microfabricated folded beams in series were achieved. (paper)