Published August 15, 1977
| Version v1
Journal article
Model for surface layer composition changes in sputtered alloys and compounds
Creators
- 1. A. W. Wright Nuclear Structure Laboratory, Yale University, New Haven, Connecticut 06520
Description
Under the assumption that extracted beam energy is quickly shared among secondary cascade members of all masses, we present a model which accounts quantitatively for recently observed equilibrium surface enrichments in heavy atoms following ion bombardment of alloys and compounds. Assuming strong radiation-driven diffusion, effects of which are directly observed, and given the time required to reach equilibrium, we can calculate the thickness Δx of the enriched layer. Alternatively, knowing Δx, a calculation of the equilibration time constant is possible
Additional details
Identifiers
- DOI
- 10.1063/1.89652;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 31
- Journal Issue
- 4
- Series
- Appl. Phys. Lett.
- Journal Page Range
- 259-260
- ISSN
- 0003-6951
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 8335813
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- ALLOYS; CHEMICAL COMPOSITION; DIFFUSION; ION BEAMS; ION COLLISIONS; ION-ATOM COLLISIONS; PLATINUM BASE ALLOYS; RECOILS; SILICON ALLOYS; SPUTTERING; SURFACES; TANTALUM OXIDES; TARGETS
- Descriptors DEC
- ATOM COLLISIONS; BEAMS; CHALCOGENIDES; COLLISIONS; OXIDES; OXYGEN COMPOUNDS; PLATINUM ALLOYS; TANTALUM COMPOUNDS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent