Published August 15, 1977 | Version v1
Journal article

Model for surface layer composition changes in sputtered alloys and compounds

Creators

  • 1. A. W. Wright Nuclear Structure Laboratory, Yale University, New Haven, Connecticut 06520

Description

Under the assumption that extracted beam energy is quickly shared among secondary cascade members of all masses, we present a model which accounts quantitatively for recently observed equilibrium surface enrichments in heavy atoms following ion bombardment of alloys and compounds. Assuming strong radiation-driven diffusion, effects of which are directly observed, and given the time required to reach equilibrium, we can calculate the thickness Δx of the enriched layer. Alternatively, knowing Δx, a calculation of the equilibration time constant is possible

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
31
Journal Issue
4
Series
Appl. Phys. Lett.
Journal Page Range
259-260
ISSN
0003-6951

Optional Information

Notes
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