Comparison of different Monte Carlo simulation software for simulating neutron depth profiling

[Background] Neutron depth profiling (NDP) method is widely used in semi-conductor production, ion implantation research, material science and other fields. [Purpose] This study aims to explore the reliability of simulation software in NDP energy spectrum analysis, and compare the results of simulating NDP by SRIM, MCNP, FLUKA, and GEANT4. [Methods] First of all, the differences of four software in simulation for alpha spectrum are discussed. Then, the experimental alpha spectrum of National Institute of Standards and Technology (NIST) standard is used to evaluate the simulation results of MCNP, FLUKA and GEANT4 in NDP analysis. [Results] The simulation results of alpha spectrum show that the peak position of alpha spectrum is close to each other when the thickness of silicon is less than 2 μm. [Conclusions] Three software, i.e., MCNP, FLUKA and GEANT4, could be used to simulate the alpha spectrum in NDP analysis whilst the MCNP achieves better accurate full width at half maximum (FWHM) and the peak position of alpha spectrum. (authors)