PEO-Like Functional Films' Polymerization in RF-PECVD

Polymer ethylene oxide (PEO) functional films can be used as a material for biocompatible research. In this paper, we investigated the structures of PEO-like films polymerized on Si surface with diethlyene glycole dimethyl ether (DEGDME) as the precursor and Ar as the dilution gas by plasma enhanced chemical vapor deposition (PECVD). And the pulse plasma model was employed to polymerize the functional films. The chemical structure of the coatings was investigated by Fourier transform inference (FTIR) and X-ray photoelectron spectroscopy (XPS). The results indicate that PEO-like structure films can be polymerized by DEGDME/Ar plasma. The concentration of C-O functional groups polymerized in the long plasma-off time was much higher than that in the short plasma-off time. With the same discharge parameters, moreover, the C-O ratio in polymers increased with a higher injected power