Published December 1986 | Version v1
Journal article Metadata-only

Damage profiles in copper single crystals after ion implantation

Creators

  • 1. Pretoria Univ. (South Africa). Dept. of Physics
  • 2. Wits-CSIR Schonland Research Centre for Nuclear Sciences, University of the Witwatersrand, Johannesburg (South Africa)

Description

Copper single crystals were implanted off-axis with carbon, neon and argon ions. Energies were chosen to obtain projected ranges between 50 and 60 nm. The resulting radiation damage was analysed by α-particle channelling using a back-scattering geometry. Auger electron spectroscopy was employed to determine the depth profiles of the implanted ions. In all cases the damage profiles extended much deeper than the projected ion ranges. The dependence of the damage depth on total fluence, energy and ion mass was investigated. Annealing of the radiation damage by conventional heating as well as pulsed electron beam irradiation was also studied

Additional details

Publishing Information

Journal Title
S. Afr. J. Phys.
Journal Volume
9
Journal Issue
4
Series
S. Afr. J. Phys.
Journal Page Range
135-138
ISSN
0379-4377
CODEN
SAPHD

INIS

Country of Publication
South Africa
Country of Input or Organization
South Africa
INIS RN
18062989
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Numerical Data
Descriptors DEI
ALPHA PARTICLES; ANNEALING; ARGON IONS; AUGER ELECTRON SPECTROSCOPY; BACKSCATTERING; CARBON IONS; CHANNELING; COPPER; CRYSTALS; DISLOCATIONS; ELECTRON BEAMS; EXPERIMENTAL DATA; ION IMPLANTATION; NEON IONS; PHYSICAL RADIATION EFFECTS
Descriptors DEC
ATOMIC IONS; BEAMS; CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DATA; ELECTRON SPECTROSCOPY; ELEMENTS; HEAT TREATMENTS; HELIUM IONS; INFORMATION; IONIZING RADIATIONS; IONS; LEPTON BEAMS; LINE DEFECTS; METALS; NUMERICAL DATA; PARTICLE BEAMS; RADIATION EFFECTS; RADIATIONS; SCATTERING; SPECTROSCOPY; TRANSITION ELEMENTS