Depth profiling in surfaces using total reflection X-ray fluorescence

Only three types of specimens can be applied for calibration in TXRF, namely pure particle-, film- or bulk-type samples. In this study 'droplet' standards, as a representative of the particle type, and 'spin-drying' standards, for film-type samples were examined and compared with a pure metal standard (bulk-type). A test procedure is described which makes it possible to detect faulty calibration samples. An iterative data processing technique is presented which extracts layer characteristics and - to a certain extend - depth profiles from TXRF data as a function of the incident angle. Two selected examples are considered, a Fe-Ti-Fe thin-layer system and an implantation profile of Ni-atoms in silicon. Based on these samples, the capability and limitations of TXRF for depth profiling are discussed. (author)