Published January 2006
| Version v1
Journal article
Analysis of the accuracy of several methods for determining the concentration of 11B+ implanted silicon
Creators
- 1. Department of Physics, P.O. Box 311427, University of North Texas, Denton, TX 76203 (United States)
- 2. Texas Instruments, Dallas, TX 75243 (United States)
- 3. Spansion, Austin, TX 78741 (United States)
- 4. Varian Semiconductor Equipment Associates, Gloucester, MA 01923 (United States)
Description
The concentration of 11B+ in silicon has been determined by a number of different analytical techniques. Several commercial vendors provided silicon wafers implanted with 11B+ ions over a wide range of fluence (4 x 1013- 3 x 101611B/cm2) and energy (300 eV-10 keV) for evaluation. The techniques used in this evaluation included the following: Elastic recoil detection (ERD) using 12 MeV F4+ ions, nuclear reaction analysis (NRA) using the 11B(p,α)8Be* reaction and secondary ion mass spectroscopy (SIMS). The accuracy and potential drawbacks of each of these techniques is discussed
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2005.07.239;
- PII
- S0168-583X(05)01431-X;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 243
- Journal Issue
- 1
- Journal Page Range
- p. 205-210
- ISSN
- 0168-583X
- CODEN
- NIMBEU
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37069608
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ACCURACY; BORON 11; DETECTION; EV RANGE 100-1000; ION MICROPROBE ANALYSIS; IONS; KEV RANGE 01-10; MASS SPECTROSCOPY; MEV RANGE 10-100; NUCLEAR REACTION ANALYSIS; SILICON
- Descriptors DEC
- BORON ISOTOPES; CHARGED PARTICLES; CHEMICAL ANALYSIS; ELEMENTS; ENERGY RANGE; EV RANGE; ISOTOPES; KEV RANGE; LIGHT NUCLEI; MEV RANGE; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; NUCLEI; ODD-EVEN NUCLEI; SEMIMETALS; SPECTROSCOPY; STABLE ISOTOPES
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.