Published February 1982 | Version v1
Journal article Metadata-only

Simple source cell design for MBE

Creators

  • 1. Semiconductor and Surface Research, Physics Department, City of London Polytechnic, 31 Jewry Street, London EC3N, 2EY

Description

A simple, low-cost, and easily-manufactured evaporation furnace, suitable for MBE, is described. The essential feature of the design is a composite heater-shroud and evaporation cell, machined from high-purity graphite. Good-quality silicon-doped gallium arsenide has been grown using this cell design

Additional details

Publishing Information

Journal Title
J. Vac. Sci. Technol.
Journal Volume
20
Journal Issue
2
Series
J. Vac. Sci. Technol.
Journal Page Range
252-253
ISSN
0022-5355

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
13672729
Subject category
S74: ATOMIC AND MOLECULAR PHYSICS;
Descriptors DEI
ALUMINIUM OXIDES; BEAM PRODUCTION; CONTAMINATION; COST; CRYSTAL DOPING; CRYSTAL GROWTH; DOPED MATERIALS; EPITAXY; EVAPORATION; FABRICATION; FURNACES; GALLIUM ARSENIDES; GRAPHITE; HEATERS; MOLECULAR BEAMS; SILICON; SPECIFICATIONS; TANTALUM
Descriptors DEC
ALUMINIUM COMPOUNDS; ARSENIC COMPOUNDS; ARSENIDES; BEAMS; CARBON; CHALCOGENIDES; ELEMENTS; GALLIUM COMPOUNDS; METALS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; SEMIMETALS; TRANSITION ELEMENTS