Published December 28, 1975 | Version v1
Journal article Metadata-only

Deposition of thin films using an isotope separator

Creators

  • 1. Salford Univ. (UK)

Description

An isotope separator ion beam has been used to prepare isotopically pure thin films, which have been examined using Rutherford backscattering. (Auth.)

Additional details

Identifiers

DOI
10.1016/0029-554x(75)90454-1;

Publishing Information

Journal Title
Nuclear Instruments and Methods
Journal Volume
131
Journal Issue
3
Series
Nucl. Instrum. Methods.
Journal Page Range
567-568
ISSN
0029-554X

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
7253432
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
BACKSCATTERING; CATIONS; FILMS; ION BEAMS; ISOTOPE SEPARATION; LEAD IONS; MONOCRYSTALS; RUTHERFORD SCATTERING; SILICON; SUBSTRATES; SURFACE COATING
Descriptors DEC
ATOMIC IONS; BEAMS; CHARGED PARTICLES; CRYSTALS; DEPOSITION; ELASTIC SCATTERING; ELEMENTS; IONS; SCATTERING; SEMIMETALS; SEPARATION PROCESSES

Optional Information

Notes
Updated automatically by Metadata and Full-Text Enrichment Agent