Published October 1995
| Version v1
Report
Correcting slanted beam profiles in superconducting storage rings
- 1. Nippon Telegraph and Telephone Corp., Atsugi, Kanagawa (Japan). LSI Labs.
Description
In the Super-ALIS superconducting storage ring for synchrotron radiation, the electron beams have been suffering from slanted profiles. These profiles degrade the uniformity of exposure in X-ray lithography. The most possible reason for this slanting problem is x-y coupling originating from the combination of the sextupole components and the vertical closed orbit distortion (COD) in the superconducting bending magnets. In this work, we present the results of correcting profiles in the Super-ALIS by reducing COD and canceling out the sextupole components. (author)
Additional details
Publishing Information
- Imprint Title
- Proceedings of the 10th symposium on accelerator science and technology
- Imprint Pagination
- 490 p.
- Journal Page Range
- p. 156-158.
- Report number
- JAERI-Conf--95-021
Conference
- Title
- 10. symposium on accelerator science and technology.
- Dates
- 25-27 Oct 1995.
- Place
- Hitachinaka, Ibaraki (Japan).
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 27045010
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM BENDING MAGNETS; ELECTRON BEAMS; MAGNETIC FIELDS; MONOCHROMATORS; ORBIT STABILITY; SPATIAL DISTRIBUTION; STORAGE RINGS; SUPERCONDUCTING COILS; SYNCHROTRON RADIATION; X-RAY RADIOGRAPHY
- Descriptors DEC
- BEAMS; BREMSSTRAHLUNG; DISTRIBUTION; ELECTRIC COILS; ELECTRICAL EQUIPMENT; ELECTROMAGNETIC RADIATION; EQUIPMENT; LEPTON BEAMS; MAGNETS; PARTICLE BEAMS; RADIATIONS; STABILITY