Published March 1989
| Version v1
Journal article
Depth profiling of He implanted in metal by ERDA
Description
The elastic recoil detection analysis (ERDA) has been performed for depth profiling of helium in the near surface region of SUS316 stainless steel using a 8 MeV 16O beam and a 50 MeV 40Ar beam. Energy spectra are converted into depth profiles by unfolding. The He profile shows a mono peak for a fluence of 2 x 1017 He/cm2 and on the other hand, a double peak for a fluence of 4 x 1017 He/cm2. The depth resolutions have been calculated for various experimental conditions. The depth resolution is estimated to be 6∼10 nm for the profiles obtained in this work with the O beam. (author)
Additional details
Publishing Information
- Journal Title
- Hosei Daigaku Ion Bimu Kogaku Kenkyusho Hokoku
- Journal Issue
- suppl.7
- Series
- Hosei Daigaku Ion Bimu Kogaku Kenkyusho Hokoku.
- ISSN
- 0286-0201
- CODEN
- HDIHD
Conference
- Title
- 7. symposium on the ion beam technology.
- Dates
- 9-10 Dec 1988.
- Place
- Koganei, Tokyo (Japan).
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 20074557
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ARGON 40 BEAMS; DEPTH; ELASTIC SCATTERING; ENERGY SPECTRA; HELIUM; MEASURING METHODS; OXYGEN 16 BEAMS; RECOILS; STEEL-CR17NI12MO3
- Descriptors DEC
- ALLOYS; AUSTENITIC STEELS; BEAMS; CARBON ADDITIONS; CHROMIUM ALLOYS; CHROMIUM-NICKEL STEELS; CHROMIUM-NICKEL-MOLYBDENUM STE; CORROSION RESISTANT ALLOYS; DIMENSIONS; ELEMENTS; HEAT RESISTING ALLOYS; HIGH ALLOY STEELS; ION BEAMS; IRON ALLOYS; IRON BASE ALLOYS; MOLYBDENUM ALLOYS; NICKEL ALLOYS; NONMETALS; RARE GASES; SCATTERING; SPECTRA; STAINLESS STEELS; STEELS