Published 1989 | Version v1
Miscellaneous

Impurity microprecipitates in silicon

Description

Volumetric microinhomogeneities of various type in production silicon crystals, grown by Czochralski and creecible-free zone melting methods, are detected using scattering of very cold neutrons, laser mass-spectrometry, secondary ion mass spectroscopy

Additional details

Additional titles

Original title (Russian)
Примесные микропреципитаты в кремнии

Publishing Information

Imprint Title
Plasma physics
Imprint Pagination
56 p.
Journal Issue
no.11
Series
Kratkie soobshcheniya po fizike.
Journal Page Range
p. 6-8.
Report number
INIS-SU--238/A

Optional Information

Notes
Imprint:Fizika plazmy.;Sbornik.