Published May 16, 1978 | Version v1
Journal article

Amorphisation and recrystallisation of InSb ion implanted layers

  • 1. AN SSSR, Novosibirsk. Inst. Fiziki Poluprovodnikov

Description

The structure of InSb layers implanted with 60 keV Ar+ ions and 300 keV He+ ions was studied as a function of implantation and annealing conditions. Two factors were assumed to govern the specific behaviour of InSb with respect to amorphisation and recrystallization: 1) heavy atomic masses of the components and 2) low melting temperature of the compound

Additional details

Publishing Information

Journal Title
Phys. Status Solidi A
Journal Volume
47
Journal Issue
1
Series
Phys. Status Solidi A.
Journal Page Range
K5-K8
ISSN
0031-8965

Optional Information

Notes
Short note.