Preparation of mirror-like YBaCuO thin films by inverted cylindrical magnetron sputtering

We describe in this paper the in-situ preparation of mirror-like YBaCuO thin films on various single-crystalline substrates by Inverted Cylindrical Magnetron (ICM) Sputtering. In order to study the preparation conditions in detail, in-situ film resistance measurements were performed at different temperatures and oxygen pressures. The film surfaces were investigated by Scanning Electron and Scanning Tunneling Microscopy (SEM, STM). It was tried to correlate the surface quality with the magnetic field configuration at the target. The critical temperature Tc was measured resistively and inductively. The critical current density jc was determined on argon ion and wet chemical etched microstrips according to the transport method. (orig./BHO)