Published May 2019
| Version v1
Journal article
Growth of single crystalline GePb film on Ge substrate by magnetron sputtering epitaxy
Creators
- 1. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049 (China)
- 2. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083 (China)
Description
This paper reports the synthesis of single-crystalline GePb alloy films on a Ge(100) substrate by magnetron sputter epitaxy. The as-grown GePb alloy films possess high crystalline quality and no dislocations, as revealed by X-ray diffractometry, transmission electron microscopy. The Pb composition of the GePb alloy was about 0.4% at the growth temperature of 250 °C and it decreased with increasing substrate temperature up to 400 °C. The thermal stability of the GePb alloy was studied using Raman spectra and atomic force microscopy (AFM)results, and it was observed that Pb segregated from the GePb alloy above 400 °C. The successful growth of single-crystal GePb lays the foundation for future GePb device fabrication.
Additional details
Identifiers
- DOI
- 10.1016/j.jallcom.2019.01.163;
- PII
- S0925838819301719;
Publishing Information
- Journal Title
- Journal of Alloys and Compounds
- Journal Volume
- 785
- Journal Page Range
- p. 228-231
- ISSN
- 0925-8388
- CODEN
- JALCEU
INIS
- Country of Publication
- Switzerland
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 55047460
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ALLOYS; ATOMIC FORCE MICROSCOPY; DISLOCATIONS; EPITAXY; MAGNETRONS; MONOCRYSTALS; RAMAN SPECTRA; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION
- Descriptors DEC
- COHERENT SCATTERING; CRYSTAL DEFECTS; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; CRYSTALS; DIFFRACTION; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; LINE DEFECTS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; SCATTERING; SPECTRA
Optional Information
- Copyright
- Copyright (c) 2019 Elsevier B.V. All rights reserved.