Published May 2019 | Version v1
Journal article

Growth of single crystalline GePb film on Ge substrate by magnetron sputtering epitaxy

  • 1. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049 (China)
  • 2. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083 (China)

Description

This paper reports the synthesis of single-crystalline GePb alloy films on a Ge(100) substrate by magnetron sputter epitaxy. The as-grown GePb alloy films possess high crystalline quality and no dislocations, as revealed by X-ray diffractometry, transmission electron microscopy. The Pb composition of the GePb alloy was about 0.4% at the growth temperature of 250 °C and it decreased with increasing substrate temperature up to 400 °C. The thermal stability of the GePb alloy was studied using Raman spectra and atomic force microscopy (AFM)results, and it was observed that Pb segregated from the GePb alloy above 400 °C. The successful growth of single-crystal GePb lays the foundation for future GePb device fabrication.

Additional details

Identifiers

DOI
10.1016/j.jallcom.2019.01.163;
PII
S0925838819301719;

Publishing Information

Journal Title
Journal of Alloys and Compounds
Journal Volume
785
Journal Page Range
p. 228-231
ISSN
0925-8388
CODEN
JALCEU

Optional Information

Copyright
Copyright (c) 2019 Elsevier B.V. All rights reserved.